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New Breakthroughs in Chinese Chip Equipment! Domestic ion implantation machine achieves full coverage of 28nm process

Time:2024-07-17Reading:1224Second


According to the official WeChat account of the State owned Assets Supervision and Administration Commission, China Electronics Technology Corporation (CETC) has achieved full coverage of the 28 nanometer process of domestic ion implantation machines, effectively ensuring the industrial safety of China's integrated circuit manufacturing industry in mature process areas.

It is reported that ion implantation machines are key equipment in chip manufacturing, and currently, 28 nanometers is the most widely covered mature process in the field of chip applications.

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Xinhua News Agency introduced that in the process of chip manufacturing, different types of elements need to be added to change the electrical properties of materials in a predetermined way. These elements are accelerated to a predetermined energy in the form of charged ions and injected into specific semiconductor materials. Ion implantation machines are chip manufacturing equipment that execute this doping process.

This time, Dianke Equipment has continuously broken through the core technologies of key modules such as optical path, control, and software, forming a full range of ion implantation machine products including medium beam, large beam, high-energy, and third-generation semiconductors, achieving full coverage of 28 nanometer process.

Nowadays, a hundred sets of electrical equipment are widely used in advanced integrated circuit production lines in China, with a total of 20 million chips produced.